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Chemical Vapor Deposition of Large-Size Monolayer MoSe2 Crystals on Molten Glass

TitleChemical Vapor Deposition of Large-Size Monolayer MoSe2 Crystals on Molten Glass
Publication TypeJournal Article
Year of Publication2017
AuthorsChen, Jianyi, Zhao Xiaoxu, Tan Sherman J. R., Xu Hai, Wu Bo, Liu Bo, Fu Deyi, Fu Wei, Geng Dechao, Liu Yanpeng, Liu Wei, Tang Wei, Li Linjun, Zhou Wu, Sum Tze Chien, and Loh Kian Ping
JournalJ. Am. Chem. Soc.
Volume139
Pagination1073–1076
Date Published01/2017
ISSN0002-7863
Keywordsfilms, grain-boundaries, graphene, growth, liquid, molybdenum-disulfide, mono layer, single-crystal, transition-metal dichalcogenides
Abstract

We report the fast growth of high-quality millimeter-size monolayer MoSe2 crystals on molten glass using an ambient pressure CVD system. We found that the isotropic surface of molten glass suppresses nucleation events and greatly improves the growth of large crystalline domains. Triangular monolayer MoSe2 crystals with sizes reaching 2.5 mm, and with a room-temperature carrier mobility up to 95 cm2(/)(V.s), can be synthesized in 5 min. The method can also be used to synthesize millimeter-size monolayer MoS2 crystals. Our results demonstrate that "liquid-state" glass is a highly promising substrate for the low-cost growth of high-quality large-size 2D transition metal dichalcogenides (TMDs).

DOI10.1021/jacs.6b12156

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